MEMS Accelerometer ·
The Silicon Spring
un
seel
.com · ΔC = ε₀·N·t·Δx/d² · >2 B units/yr
Acceleration
0.0 g
ΔC
0.0 aF
Stage
at rest
Proof mass
Comb fingers
Acceleration vector
Sense / signal
Play
Pause
Unmute
Reset
Un
seel
.com · MEMS Accelerometer